http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20100019393-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2891 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01M99-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2009-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e43f24491a0b8adcf1772cef72dfb20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2cb362d7982e51295e304338ae81fc31 |
| publicationDate | 2010-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20100019393-A |
| titleOfInvention | Probe method and program for probe |
| abstract | According to the probe method of the present invention, when the four chips C arranged in the inclined direction of the wafer W are electrically contacted with the plurality of probes 12A, the first reference includes the center chip Cc of the wafer W when four inspections are performed at the same time. Obtaining each of the inclined chip rows L1 and a plurality of inclined chip rows arranged in parallel with the upper left side, arranging a plurality of probes 12A in each and arranging the contact positions of the respective inclined chip rows; A first process for a plurality of inclined chip rows arranged in parallel to the second reference inclined chip rows L3 and the second reference inclined chip rows L3 at the lower right side of the first reference inclined chip rows L1. And a step of setting the contact position in the opposite direction, and a step of setting the plurality of index groups and the order of inspection based on the setting of the contact position. |
| priorityDate | 2008-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.