| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7c852d7a0e47e626b0296e83ae9782b7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q80-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q70-06 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q60-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q60-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 |
| filingDate |
2008-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d50d4bf14f3e37574c4b3d16ca0bde3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9a39ca36b92a37202944e579d1cb9349
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5be7affcbaa708fef227bbf5ba0b5b08 |
| publicationDate |
2010-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20100015321-A |
| titleOfInvention |
Nanolithography using a viewport |
| abstract |
A two-dimensional cantilever array for use in delivering ink from the tip of the cantilever to the substrate is improved by using a viewing window for viewing the cantilever on the far side. When there are a large number of cantilevers, this improves the leveling characteristics. It also provides improved laser access. Of particular importance in bioarrays and combinatorial applications. Large parallel direct writing of more than 55,000 cantilevers can be achieved. |
| priorityDate |
2007-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |