| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c62446fc5c9d4465eaef764744bbb71b |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 |
| filingDate |
2008-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c6aae99aa4f1e84a657b96a5796de0a7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6bdd4c4eb39b0beba75bb572996205af |
| publicationDate |
2010-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20100007332-A |
| titleOfInvention |
Film-type Photodegradable Transfer Material |
| abstract |
The present invention provides a film type photodegradable transfer material capable of improving the resolution since the residue of the photoresist layer does not appear after removal of the support film before exposure when applied to a photolithography process. |
| priorityDate |
2008-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |