| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cbffa3b81b3b862dc7220b5648f5f745 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2203-0228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2201-30415
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2329-0444
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2329-4626
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2329-0418
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2201-30453 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J3-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J31-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J1-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J1-3044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J9-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J31-127
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J9-025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J63-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J31-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J1-30 |
| filingDate |
2008-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_daf2ad08680de1557456567eedac0909
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a980f82904b1f6db30b323acaecd0be0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_823a336916c427cc09bd58d4a013f844 |
| publicationDate |
2010-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20100002598-A |
| titleOfInvention |
Field emission array having carbon microstructure and method of manufacturing same |
| abstract |
The method of manufacturing a field emission array having a carbon microstructure according to the present invention includes a photomask attaching step of attaching a photomask having a pattern groove to a surface of a transparent substrate, and a photoresist attaching a negative photoresist to the surface of the photomask. An exposure step of irradiating light from the opposite side of the portion of the transparent substrate to which the photomask is attached to cure a portion of the negative photoresist with light irradiated through the pattern grooves to the negative photoresist; The development step of removing the part to form a microstructure formed by curing the negative photoresist, the pyrolysis step of heating and carbonizing the microstructure, and the cathode attached to attach a cathode for voltage supply to the surface of the transparent substrate on which the microstructure is formed Characterized in that it comprises a step The. According to the present invention, a carbon microstructure used as an electron emitting device can be manufactured at a simple and low cost. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101416713-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013042916-A1 |
| priorityDate |
2008-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |