http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20090127066-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d79a3714d75520adeea100b7ed428a77 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-21 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-322 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B15-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-06 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-322 |
| filingDate | 2009-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34fdb90d10ee2cdf6a70973b8187fc40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28bd26e2dbf23acae94c934a3dea6e8a |
| publicationDate | 2009-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20090127066-A |
| titleOfInvention | Epitaxial Silicon Wafers and Manufacturing Method Thereof |
| abstract | When the epitaxial film is grown only on the surface of a large diameter wafer of 450 mm or more, the warpage of the wafer can be reduced, and the epitaxial silicon wafer capable of obtaining high intrinsic gettering capability and a method of manufacturing the same are provided. Intrinsic gettering function by introducing nitrogen, carbon, or both into a large-diameter, high-resistance silicon wafer with a diameter of 450 mm and a specific resistance of 0.1 Ω · cm or more into the melt during ingot pulling. Granted. Accordingly, after the epitaxial film 12 is grown, large warping of the silicon wafer 11 hardly occurs. As a result, the warpage of the epitaxial silicon wafer 10 can be reduced, and high intrinsic gettering capability can be obtained. |
| priorityDate | 2008-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.