| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_154f5a8a983d88f296117dcc92946ab4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66742
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66969
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7869 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-136
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 |
| filingDate |
2008-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_66a9db10a95dbdf4982d2c94d8dc8e60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_797469fb3b2c9c89da88afe8c3e13113
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_38945510e8ccd86c0589a9b2e8c0a408
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f6eed702a081b7966be6832490dafaf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_687a7974c2497e71f5e8c01b1a35a02d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_81b7d2f2de44e917dab5a4632021b6cf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_55ed207534ed3603003df694ab63a71b |
| publicationDate |
2009-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20090126813-A |
| titleOfInvention |
Method of manufacturing oxide semiconductor thin film transistor |
| abstract |
A method of manufacturing an oxide semiconductor thin film transistor using a transparent oxide semiconductor as a channel material is disclosed. The method of manufacturing an oxide semiconductor thin film transistor disclosed includes forming a protective film on a channel layer and then performing a heat treatment at a temperature of 100 ° C. or higher for at least 1 hour. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102376721-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140076919-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8994023-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9954084-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102376721-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150056240-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9502246-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20110078069-A |
| priorityDate |
2008-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |