| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6f932d94618d9b875e401457b33e9761 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-423
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-168
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-266
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-422 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 |
| filingDate |
2008-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_040306c8259ae15ce5ce6129b4b01182
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_76e18c4f64dd0775ff0c2b3f723a1c57
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f390ba9e0592666097d96d746aa1711b |
| publicationDate |
2009-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20090124198-A |
| titleOfInvention |
Thinner composition for removing photosensitive resin and antireflection film |
| abstract |
The present invention relates to a thinner composition for removing a photosensitive resin and an anti-reflection film used in a semiconductor device and a thin film transistor liquid crystal display device manufacturing process, more specifically, 10 to 70% by weight of propylene glycol alkyl ether acetate (PGMEA); 5 to 40 weight percent of methyl-3-methoxy propionate (MMP); 5 to 50 weight percent cyclohexanone (CHN); And gamma butyrolactone (GBL) relates to a thinner composition for removing a photosensitive resin and anti-reflection film comprising 1 to 10% by weight. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160086631-A |
| priorityDate |
2008-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |