| abstract |
Provided is a plasma generator capable of preventing destruction by thermal stress without lowering the generation efficiency of plasma. The plasma generator 1 has the base 3 in which the discharge space 5 was formed, and the electrode pair 9 formed in the base 3 with the discharge space 5 interposed therebetween, and the electrode pair 9 At least one of the electrodes 7 has a plurality of electrode layers 15 formed at different positions in the opposite direction of the electrode pair 9. |