| abstract |
A metal polishing liquid comprising a metal oxide dissolving agent, a metal anticorrosive agent, a polyacrylic acid polymer, a metal oxidizing agent, and water, wherein the metal oxidizing agent is hydrogen peroxide, and the content of hydrogen peroxide is 12 to 30% by weight based on the weight of the metal polishing liquid. With the polishing liquid for phosphorus metal, excellent flatness of the surface to be polished can be realized while maintaining a good polishing rate. Moreover, the grinding | polishing method of the to-be-polished film using this is provided. |