http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20090120636-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4aaf127397fd5f114d8bfee1628e155e |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N15-1463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-28 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B7-06 |
filingDate | 2008-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d6a2fb26f719606828f0eb71c1d6f1cc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_632f73f755339925b85bf13956cc8eff http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_153c2db9e580cc2951c45ab7507ac3fb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc2238593d8ebd4f609e66b7f0b557ca |
publicationDate | 2009-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-20090120636-A |
titleOfInvention | Method of measuring thickness of polymer resin insulator film on bonding wire surface |
abstract | The present invention relates to a method for measuring the thickness of a polymer resin insulating film on the surface of a bonding wire, and more specifically, to a thickness of the polymer resin insulator film coated on the surface of a bonding wire through a dipping process. Recoating a metal conductive film on the surface of the polymer resin insulator membrane by ion beam sputtering method (IBS) to protect the polymer resin insulator film and distinguishing contrast when measured by transmission electron microscope, and ion focusing beam method (FIB) And a sample for a transmission electron microscope (TEM), and then measuring the thickness and analyzing the uniformity of the polymer resin insulator film on the surface of the bonding wire using the transmission electron microscope (TEM). |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11262279-B2 |
priorityDate | 2008-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.