http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20090111277-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-108 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 2009-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2009-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20090111277-A |
| titleOfInvention | Chemically Amplified Positive Resist Composition |
| abstract | The present invention is a resin (A) containing a structural unit (a1) having a group that is labile to an acid in the side chain, and does not contain a fluorine atom,n n n Not only contains one or more selected from the group consisting of a structural unit (b1) having an acid labile group in the side chain, a structural unit (b3) having a hydroxyl group in the side chain and a structural unit (b4) having a lactone structure in the side chain, Resin (B) containing a structural unit (b2) having a fluorine-containing group in the side chain, andn n n Contains acid generators,n n n The chemically amplified positive resist composition whose ratio of the structural unit (b1) among all the units which comprise the said resin (B) occupies less than 10 mol% is provided. |
| priorityDate | 2008-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 308.