| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D11-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D11-00 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29L31-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29L31-58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29K75-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29K105-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C39-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-26 |
| filingDate |
2007-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2009-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20090110818-A |
| titleOfInvention |
Polishing pads and manufacturing method thereof |
| abstract |
A first aspect of the present invention is to provide a polishing pad having excellent durability and good adhesion between the polishing layer and the substrate layer. Is composed of a thermosetting polyurethane foam having a substantially spherical continuous bubble having an average bubble diameter of 20 to 300 µm, the polyurethane foam containing an isocyanate component and an active hydrogen-containing compound as raw material components, and containing the active hydrogen The compound is characterized by containing 30 to 85% by weight of a high molecular weight polyol having 2 to 4 hydroxyl groups of 20 to 10 mgKOH / g functional groups. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150123728-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150112855-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140141492-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150047444-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140141490-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140141491-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220088835-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210059343-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140056116-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015027026-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150124898-A |
| priorityDate |
2007-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |