http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20090105775-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24917 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30655 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-5806 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate | 2008-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2009-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20090105775-A |
| titleOfInvention | Method for forming metal layer of substrate etching part and substrate and structure having metal layer formed using same |
| abstract | The present invention provides a method of forming a metal layer on an etching portion of a substrate. Specifically, the method of forming a metal layer in the etching portion of the substrate, etching the substrate to form an etching portion having a vertical plane, forming a diffusion material layer on the surface of the etching portion, heat treatment of the diffusion material layer, a part of the Forming a seed layer diffused below the surface of the etch, and forming a metal layer on the seed layer. According to the above method, since the surface characteristics of the substrate etching portion are improved by the seed layer, a metal layer having excellent adhesion and a uniform thickness can be formed on the vertical surface of the etching portion.n n n n Substrate, Etch, Metal Layer, Scallop, DRIE, Heat Treated, Diffusion |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190041982-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200105978-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180005718-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180136576-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200010579-A |
| priorityDate | 2008-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 38.