http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20090103840-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-549 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K85-40 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-30 |
| filingDate | 2009-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2009-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20090103840-A |
| titleOfInvention | Silicon film forming method |
| abstract | The present invention relates to a method for forming a silicon thin film. Method for forming a silicon thin film of the present invention, (S1) preparing a composition for forming a thin film containing a silicon organic compound; (S2) applying the composition for forming a thin film on a substrate; And (S3) heat-treating the composition for forming a thin film applied to the substrate.n n n According to the method for forming a silicon thin film of the present invention, the silicon thin film can be formed in a simple and inexpensive process by using a liquid phase process. In addition, a large-area thin film can be easily produced on a substrate, and the physical and electrical properties of the silicon thin film can be changed to be suitable for the device used by adjusting the composition of the organic compound, heat treatment or optical processing process conditions. The method for forming a silicon thin film of the present invention can be widely used for manufacturing various products such as solar cells, thin film transistors, organic light emitting diodes, image sensors, and the like. |
| priorityDate | 2008-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 51.