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publicationDate 2009-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20090103530-A
titleOfInvention Synthesis system for silicon carbide nanopowders
abstract BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a silicon carbide nanopowder synthesizing apparatus, comprising: generating a plasma in a synthesizing apparatus having a constant vacuum degree, and supplying a precursor gas and a transfer gas including a silicon-carbon compound to the plasma and a rapid cooling It comprises a cooling gas supply unit and a carbon electrode for supplying the gas inclined at a predetermined angle.n n n According to the above, the surface of the particles can be lowered by rapidly cooling the surface of the nanoparticles when synthesizing the silicon carbide (SiC) nanopowder by the cooling gas supply unit, and the cooling gas is supplied at an angle to be inclined at a predetermined angle to generate the whirlwind phenomenon. Aggregation of the silicon carbide nanopowder particles can be minimized.
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