| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-50 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-022425
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D3-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-022 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D17-00 |
| filingDate |
2009-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_75a07c46763e41f34197c3cb155729d9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3f0aba3c95fccd4da7e13b82d4173a6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d769c919394a2f0f33583b6d347c861a |
| publicationDate |
2009-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20090100305-A |
| titleOfInvention |
How to stop background plating |
| abstract |
A method of preventing background plating of a semiconductor substrate using an oxidant is disclosed. |
| priorityDate |
2008-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |