http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20090093486-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b31896b0595e5629c470c80b74b2d2e4 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0427 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0256 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0255 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-014 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-036 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-022 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-00 |
| filingDate | 2008-02-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_108ba71eb8258db8647c071dd094ca3f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6cb5e6af1dab47f1d76c900c40178b65 |
| publicationDate | 2009-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20090093486-A |
| titleOfInvention | Physical/chemical sensor using piezoelectric microcantilever and manufacturing method thereof |
| abstract | The present invention discloses a physical / biochemical sensor using a multi-size piezoelectric microcantilever resonator array capable of simultaneously and quantitatively analyzing the effects of surface stress changes in addition to mass application effects, and a fabrication method thereof. In a physical / biochemical sensor using a piezoelectric microcantilever resonator, the piezoelectric microcantilever resonator can quantitatively analyze not only the mass change of the sensor surface generated during the sensing process but also the surface stress change caused by the adsorbed sensing target material. It is composed of a structure in which a plurality of piezoelectric microcantilever resonators having different sizes are arranged so that the effects of the surface stress change and the surface stress change can be simultaneously quantitatively analyzed. |
| priorityDate | 2008-02-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.