| abstract |
The present invention discloses a method of forming a coating on a surface. The method includes depositing a hybrid layer comprising a mixture of polymeric and non-polymeric materials on a surface. The hybrid layer can have a single phase or can include multiple phases. The hybrid layer is formed by chemical vapor deposition using a single source of precursor material. The chemical vapor deposition process may be plasma enhanced and may be performed using reactant gases. The precursor material may be an organosilicon compound, for example siloxane. The hybrid layer can include various types of polymeric materials, such as silicone polymers and various types of nonpolymeric materials, such as silicon oxides. By changing the reaction conditions, the weight percent ratio of polymeric material to nonpolymeric material can be adjusted. The hybrid layer can have various properties suitable for use in an organic light emitting device, such as light transparency, impermeability, and / or flexibility. |