http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20090078524-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6f932d94618d9b875e401457b33e9761 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-063 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-425 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-422 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-426 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-423 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02071 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-34 |
| filingDate | 2008-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d82ff963c344a550f56f3ffc71fba10a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_82760315abcaa77a965475b72b585d21 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5efa6365927553b8dc7a2ba2d6fe81c6 |
| publicationDate | 2009-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20090078524-A |
| titleOfInvention | Stripping solution composition for removing photoresist residue and peeling method using the same |
| abstract | The present invention relates to a peeling liquid composition for removing a photoresist residue comprising (A) an organic sulfonic acid compound, (B) a hydroxycarboxylic acid compound, (C) a polyhydric alcohol and (D) water, and a peeling method using the same. According to the present invention, in a manufacturing process such as a semiconductor device and a flat panel display device, a photoresist residue containing a cured and / or altered photoresist that may occur during an ashing process may be deposited by a batch method or a single sheet method. Alternatively, the present invention provides a peeling liquid composition for removing photoresist residues and a peeling method using the same, which can be easily removed by a spray method and can also prevent corrosion of the lower metal film and the insulating film exposed to the peeling liquid composition. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210062762-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8687492-B2 |
| priorityDate | 2008-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 111.