http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20090078142-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8d0fc2b70675ee19bd5fc464f5ae9061 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2008-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e2399ac29c1cbb2759de303fa51787b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d03140d39bbe8137be948aa6590f0ed0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e84a9f6096a346b075e6fc470eacc25a |
| publicationDate | 2009-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20090078142-A |
| titleOfInvention | Manufacturing Method of Photonic Crystal Optical Device |
| abstract | BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a photonic crystal optical element, which is very difficult to manufacture a photonic crystal optical element in the prior art, and uses expensive extreme ultraviolet lithography (DUV lithography) or e-beam lithography equipment. In order to solve the problem of increased manufacturing cost and difficulty in commercialization, an imprinting stamp was manufactured by using a nanosphere sphere lithography process using a hydrophobic self-assembled monolayer (SAM) pattern and then using the polymer-based stamp. By manufacturing a photonic crystal optical circuit or a photonic crystal optical circuit based on a high refractive index material, the present invention is directed to reducing the cost of fabricating a photonic crystal optical element and making it easier to manufacture a wider variety of optical circuits. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20110075547-A |
| priorityDate | 2008-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523291 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID977 |
Total number of triples: 19.