http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20090077736-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-80 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-427 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2009-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d2cc03259fd0ef1cbe1501931911114 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac79c229a332ed9dba8cac9041d70d0e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d7f92babb0f9c38eef9843205cd3f751 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_13b1d3e9391eeb2da78ba93f5bbb1f36 |
| publicationDate | 2009-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20090077736-A |
| titleOfInvention | Photolithographic Reticle Processing Method |
| abstract | Methods and apparatus are provided for etching a metal layer disposed on a substrate, such as a photolithographic reticle. In one aspect, a method is provided for substrate processing, the method comprising positioning a substrate in a processing chamber having a metal photomask layer applied on an optically transparent material, an oxygen containing gas, a chlorine containing gas, and a trifluorine At least one of romethane (CHF 3 ), sulfur hexafluoride (SF 6 ), hexafluoroethane (C 2 F 6 ) or ammonia (NH 3 ), and optionally a chlorine-free halogen-containing gas and / or an inert gas Introducing a processing gas into the processing chamber, generating a plasma of the processing gas within the processing chamber, and etching the exposed portion of the metal layer applied onto the substrate. |
| priorityDate | 2006-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 55.