| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8d0fc2b70675ee19bd5fc464f5ae9061 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82B3-0009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0015
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82B1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate |
2008-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_75e859cb17dfad04b1df5b01072f1efe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e2399ac29c1cbb2759de303fa51787b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_86459a65cbfa667446e4342a432e9f56 |
| publicationDate |
2009-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20090076568-A |
| titleOfInvention |
Template manufacturing method for nanoimprint in nanosphere form, method for forming single layer nanosphere polymer pattern using the same and application method using the single layer nanosphere pattern |
| abstract |
Template manufacturing method for nano-imprint in the form of nanospheres, a method of forming a single-layer nanosphere polymer pattern using a nanoimprint technology and an application method using the single-layer nanosphere polymer pattern is provided, the nanospheres of the form according to the present invention The template for nanoimprinting comprises the steps of laminating nanospheres on a substrate; Transferring the outer layer of the nanospheres to a template polymer layer; Comprising the step of removing the nanospheres from the template polymer layer for the template to complete the nanosphere-shaped template, it is possible to form a single layer nanosphere polymer pattern structure having a uniform morphology in a large area on the substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9956740-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103079989-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012141484-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-3087097-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101420232-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015163596-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9968964-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015183007-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012023724-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012023724-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020074831-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013162174-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012141484-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10549314-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014084590-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013154582-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015156533-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9566722-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8753526-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150003194-A |
| priorityDate |
2008-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |