http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20090075794-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4edd4e526605dbd18b513b4b30d19ab2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bf1744e80a9fe1c1a0a7266e9e6c80 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b128ba055402f655aa749044d2ccc7a9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7d53dd649625d30a89356fbb8553b79e |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32139 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-20 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-06 |
| filingDate | 2008-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7aa73362c1b5db035dd11bbb4c1e43ce http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f20174aeef9eda7527b5e09757729b06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e448bfc6df4bc0b79afeb31ef7d00155 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4fc75dca034f3db0de2f3b1bdecb88c4 |
| publicationDate | 2009-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20090075794-A |
| titleOfInvention | Etching Liquid Composition |
| abstract | A metal film such as an aluminum film or an aluminum alloy film is etched with good controllability, while suppressing and preventing occurrence of resist bleeding, so that a metal film having an intended tapered shape and excellent flatness can be obtained. An aqueous solution containing phosphoric acid, nitric acid, and an organic acid salt is used as an etching liquid composition for etching a metal film on a substrate. As said organic acid salt, At least 1 sort (s) of ammonium salt, amine salt chosen from the group which consists of aliphatic monocarboxylic acid, aliphatic polycarboxylic acid, aliphatic oxycarboxylic acid, aromatic monocarboxylic acid, aromatic polycarboxylic acid, and aromatic oxycarboxylic acid, At least 1 sort (s) chosen from the group which consists of a quaternary ammonium salt and an alkali metal salt is used. Moreover, the density | concentration of the said organic acid salt shall be in the range of 0.1-20 weight%. In addition, the etching liquid composition of this invention is used when the said metal film is aluminum or an aluminum alloy. |
| priorityDate | 2007-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 62.