| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5f7f120efe096284c7389702c969cf3d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5f708f49e9e89eb2d377058d7326c1f3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42384
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66765
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78636
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78603
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4908 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-283
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-417
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 |
| filingDate |
2007-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e62a4c3fcaf6f8d6eb065c2b1ac3e5dc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c762e0c4f191d1a1f5e1bebcfcbc3a5b |
| publicationDate |
2009-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20090071538-A |
| titleOfInvention |
Semiconductor device and manufacturing method of semiconductor device |
| abstract |
In the semiconductor device according to the present invention, a groove is formed in the insulator layer on the substrate, and a gate electrode is formed in the groove so that the surface thereof is substantially flat with the surface of the insulator layer. A semiconductor layer is formed on the gate electrode via the gate insulating film, and at least one of a source electrode and a drain electrode is electrically connected to the semiconductor layer. In particular, the gate insulating film includes an insulator coating film formed on the gate electrode and an insulator CVD film formed thereon. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11784259-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11282964-B2 |
| priorityDate |
2006-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |