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publicationDate 2009-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20090064402-A
titleOfInvention Silicon production using fluidized bed reactor integrated into Siemens process
abstract Polycrystalline silicon is prepared using a fluidized bed reactor and a Siemens reactor. The method includes feeding exhaust gas from a Siemens reactor as the feed gas to the fluidized bed reactor.
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