http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20090063416-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_33cf281df1fdf76b7da1bb88a75ba80d |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-12044 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-805 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-164 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-24 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-10 |
| filingDate | 2007-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b2dd6bfa0a7f8488a6ec36a71916a3b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4618a2261ceab59cb7dd43e5f398208e |
| publicationDate | 2009-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20090063416-A |
| titleOfInvention | Deposition apparatus and organic electroluminescent device manufactured using the same |
| abstract | The present invention provides a deposition apparatus for performing a deposition film forming process for a substrate loaded into the chamber comprising a chamber, an organic material ejection opening, an electrode material ejection opening, wherein the position of the organic ejection opening and the electrode material ejection opening satisfies the following equation. Provided is a deposition apparatus characterized by the above, it is possible to manufacture a deposition apparatus and an organic electroluminescent device using the same, which can be more uniform and stable deposition and at the same time significantly reduced defect rate. |
| priorityDate | 2007-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 58.