| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24802 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0233
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-022 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 |
| filingDate |
2007-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5a04df35de4ad040ab5c9529486785e4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78380340c5fe982f4a859386dbb7b184
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ac4d5abe7f097742d5612d14ae3a9a0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_32323f684c69639aff658db33434821b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_66f406a821d94b68a4d6f9d6bc6df24f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_66841aa0bca1d2c932bef966d2401692 |
| publicationDate |
2009-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20090058524-A |
| titleOfInvention |
A radiation-sensitive composition, a method of forming a silica-based film, a device and a member having a silica-based film, a silica-based film, and a photosensitive agent for an insulating film |
| abstract |
(a) Component: The siloxane resin obtained by hydrolytically condensing the silane compound containing the compound represented by following General formula (1), (b) Component: The solvent which (a) component melt | dissolves, (c) Component: A radiation sensitive composition containing quinone diazido sulfonic acid ester.n n n [Tue 1]n n n n n n n n [In formula (1), R < 1> represents an organic group, A represents a divalent organic group, X represents a hydrolysable group, and some X in the same molecule may be same or different.] |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20110001903-A |
| priorityDate |
2006-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |