http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20090049406-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1bc8d5b80410c3a0594da023cfabcbe0 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F20-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F20-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J5-22 |
| filingDate | 2007-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d69820b5bb679238388731d796db7c49 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9a56a11d70d289233da115afc18fd035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60aae293ba1a009e613821b71d79cf11 |
| publicationDate | 2009-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20090049406-A |
| titleOfInvention | Polymeric polymer comprising a cyclic ester group, and an organic antireflection film composition comprising the same |
| abstract | The present invention uses a polymer polymer comprising a cyclic ester group, an organic antireflective coating composition comprising the polymer polymer, and the organic antireflective coating composition, which are positioned between the etched layer and the photoresist film for the purpose of absorbing an exposure source in a photolithography process. The present invention relates to an organic anti-reflective coating prepared by improving the etching rate of the organic anti-reflective coating, facilitates the formation of the organic anti-reflective coating, and serves to improve adhesion to the substrate.n n n n Organic antireflection film, cyclic ester group |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018226016-A1 |
| priorityDate | 2007-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 69.