| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6f932d94618d9b875e401457b33e9761 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-16 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-08 |
| filingDate |
2007-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f49bf73a4335dc3cd90dd19ba524fadc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f349641abe26cc591615b4e29cb3f267
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51864babcc644b14518a06f11c6734ba |
| publicationDate |
2009-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20090049364-A |
| titleOfInvention |
Etching solution composition and method of forming metal pattern using same |
| abstract |
The present invention provides 0.1 to 7% by weight of nitric acid (HNO 3 ), sulfuric acid (H 2 SO 4 ) or a mixture thereof, based on the total weight of the composition; 0.5-20% by weight of (NH 4 ) 2 S 2 O 8 ; 0.01 to 1 wt% fluorine-containing compound; 0.01-1% by weight of heterocyclic amine compound; And it provides an etchant composition and a method of forming a metal pattern using the same, characterized in that it comprises 71 ~ 99.38% by weight of water.n n n n Copper, molybdenum, etchant |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170088820-A |
| priorityDate |
2007-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |