| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dd7c27b9ec61781656e6f039702fd568 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-64 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B32-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82B3-00 |
| filingDate |
2007-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0f573807d03f4960149ffd0055edf032
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f7250b2336a610ae2c7ae929dcd51b2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5ae56d6c196e83f6e1fb241ce5d69733
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_807518a0b5e9443b46fbd57c85996fc0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51a98b6184876627a37714fedd9b2264 |
| publicationDate |
2009-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20090048751-A |
| titleOfInvention |
Method for preparing metal nanoparticles using atomic layer deposition |
| abstract |
The present invention relates to a method for producing metal nanoparticles by atomic layer deposition method, according to the present invention is easy to control the size and distribution on any substrate compared to the nanoparticles prepared by the conventional method nanocatalyst or magnetic and nano-rich It can be well applied to various nano functional materials such as metal charge storage layers for gate memory devices.n n n n Nanoparticles, Nanospot Size Control, Atomic Layer Deposition, Nanotubes |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150012003-A |
| priorityDate |
2007-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |