| abstract |
The present invention relates to a master mold manufacturing method and a pattern blanket manufacturing method using the same. One of the methods for producing a master mold for blanket production provided by the present invention includes the steps of: (S11) preparing a substrate for a master mold; (S12) coating one or two or more materials selected from chromium (Cr), indium tin oxide (ITO), and methacrylate-based compounds on the upper surface of the master mold substrate prepared in step (S11); (S13) laminating a dry film resist layer on the coating layer on the substrate for master mold; And (S14) exposing and developing the dry film resist layer to form a resist pattern. According to the present invention, a large-area patterned blanket having a constant depth can be easily manufactured by using a master mold having enhanced release properties.n n n n Pattern Blanket, Dry Film Resist, Release Treatment, Surface Treatment, Monolayer |