| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f50f95c17e4934fb9f9810574cdf87aa |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-62 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3146
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0332
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate |
2008-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_02c18b8a1dc8e766a77fab739ee0c546
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_55fb12f266133a1d81bc8ff966564662
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_feaedf80373fbcaa79f11e0ead452071 |
| publicationDate |
2009-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20090027156-A |
| titleOfInvention |
Method of Forming Carbon Polymer Membrane Using Plasma CDD |
| abstract |
A method of forming a hydrocarbon-containing polymer film on a semiconductor substrate by a capacitively-coupled plasma CVD apparatus is provided. The method comprises a hydrocarbon-containing liquid monomer having a boiling point of about 20 ° C. to about 350 ° C. (C α H β X γ , where α and β are 5 or more natural numbers; γ is an integer comprising 0; X is O, N or F), vaporizing the liquid monomer which is unsaturated and has no benzene structure; Introducing gas into which the monomer is vaporized into a CVD reaction chamber having a substrate located therein; And forming a hydrocarbon-containing polymer film on the substrate by plasma polymerizing the gas. The liquid monomer is unsaturated and does not have a benzene structure. |
| priorityDate |
2007-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |