http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20090026858-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_142d981bd6c180968f769e0da8f620da http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_717c792fca7cc9c290c9db33e8fe078b |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-25 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-27 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-553 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-25 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-27 |
filingDate | 2007-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0128c49c9600dccc726bb4bb1d80da7b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c13717b1a9da737326df1cdd6d3b791 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0b966c6f6773418f2342bf015c373814 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c6e3d3886f5979f50afa00e829eccfb |
publicationDate | 2009-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-20090026858-A |
titleOfInvention | Surface plasmon resonance sensor in the form of optical waveguide and its manufacturing method |
abstract | Disclosed are a surface plasmon resonance sensor and a method of manufacturing the same. The surface plasmon resonance sensor according to the present invention includes a substrate, a light source unit for generating and emitting inspection light, and a plate shape on the substrate, and an optical guide unit for guiding incident inspection light. In addition, the surface of the light guide portion is formed on the surface of the light guide by incident light incident at a predetermined angle of incidence of the plasmon resonance phenomenon occurs through the light guide portion to form a surface plasma wave, the inspection light incident at an angle other than the incident angle of the plasmon resonance phenomenon occurs A metal thin film on which the sample to be inspected is located is provided on the other side of the surface in contact with the light guide portion. It also includes a light detecting unit for detecting the inspection light reflected by the metal thin film and emitted through the light guide portion. According to the present invention, a light guide portion for guiding light on a substrate is formed in a plate shape, and the light source portion, the photodetection portion, and the metal thin film can be integrated on a single chip of several hundred micrometers using the same process. Therefore, it can be applied to the portable terminal, the production cost can be lowered through mass production. In addition, by forming a metal thin film on the side of the light guide portion, it is possible to produce a metal thin film in a very small size, it is possible to measure even a very small amount of liquid or gas. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011065627-A1 |
priorityDate | 2007-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.