| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f0e688f4f0f360c3093469970677fdbe |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y15-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-127
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-407
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-30 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-12 |
| filingDate |
2007-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c42c2b6d248ca9c636ecae38a8f07663
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bbbc325f523f05c9fd3988aad729411a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ec278b38c31152507f490239a16414e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e448f4f5995009ded0ab3d6927a7287 |
| publicationDate |
2009-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20090022620-A |
| titleOfInvention |
Hydrogen sensor manufacturing method using palladium-nickel alloy thin film and hydrogen sensor manufactured using the method |
| abstract |
According to the present invention, a method of manufacturing a hydrogen sensor using a Pd-Ni alloy thin film is disclosed. The method includes the steps of (a) applying a resin layer on a substrate, and then forming a sensor pattern; (b) depositing a Pd-Ni alloy on which a relative ratio of Pd and Ni is controlled while controlling the deposition rates of Pd and Ni on the substrate on which the sensor pattern is formed; (c) removing the resin layer to form a Pd-Ni alloy sensor of the sensor pattern on the substrate; (d) applying a resin layer on the substrate on which the Pd-Ni alloy sensor is formed, and then forming an electrode pattern at a predetermined position between both ends of the Pd-Ni alloy sensor; (e) depositing a conductive metal on the resin layer; (f) removing the resin layer to form an electrode of the electrode pattern electrically connected to the Pd-Ni alloy sensor. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014142912-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101151662-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019234746-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101282768-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011081245-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210131077-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011081308-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101105335-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101067557-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105143858-A |
| priorityDate |
2007-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |