http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20090019855-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_16d7f610531dbae77bcb2e95d91a071b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B35-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B33-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-064 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-22 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-22 |
| filingDate | 2007-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a5adc2bf8815d5f182dbb8defad0dfb2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e727a814c58014a6cae0b69737471127 |
| publicationDate | 2009-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20090019855-A |
| titleOfInvention | High Power Laser Flatbed Product Processing System Controller |
| abstract | A pulsed DUV product processing apparatus and method for transmitting light for irradiating the pulsed DUV product mounted on a work stage for crystallization of material on the pulsed DUV product, each selected narrow range based on pulse-to-pulse A laser controller comprising a light train and a pulsed laser DUV light source for generating an ultra narrow ultra long beam of light pulses having a set of parameters required to remain within a value of a laser controller; Work stage controller; A system controller that receives a process resafe control command from a customer reef control command generator and provides control signals to the laser controller and the work stage controller, wherein the system controller is selected by a user through an external process user interface A pulsed DUV product processing apparatus and method is disclosed that includes a database driven process controller that includes a database that includes possible generic process command steps. |
| priorityDate | 2006-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.