| abstract |
As a positive resist composition, the resin component (A) which increases alkali solubility by the action of an acid, and the acid generator component (B) which generate | occur | produces an acid by exposure, The said resin component (A) Structural unit (a1) derived from oxystyrene, structural unit (a2) represented by the following general formula (a2-1) or (a2-2), and the following general formula (a3-1) or (a3-2) It contains the structural unit (a3) shown. |