http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20090015410-A

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publicationDate 2009-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20090015410-A
titleOfInvention Dynamic Focusing Laser Etching Device for Touch Panel Transparent Electrode Processing
abstract The present invention relates to a dynamic focusing laser etching system for dry etching an electrode pattern using a laser to an ITO transparent conductive film of a touch panel, wherein a laser oscillator for oscillating a laser beam and a laser beam oscillated from the laser oscillator are inputted. A dynamic focusing module for irradiating the laser beam outputted from the dynamic focusing module and the dynamic focusing module so as to form the same position with respect to the Z axis even if the focus of the input laser beam is moved along the X axis or the Y axis; Including a fixed worktable disposed below the scanner head to align and fix the glass substrate, the fine transparent electrode patterns of the plurality of touch panels disposed on the glass substrate may be simultaneously and uniformly processed.n n n According to this configuration, it is possible to quickly close the loop process of fine transparent electrode patterns on a plurality of touch panels without moving the laser system on the worktable or moving the worktable along the X or Y axis. As a result, the reliability and productivity of the product can be improved, and problems such as waste water and waste treatment in the conventional wet etching process can be solved.
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