| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-81
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3251
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3229
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3222
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3224
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3217
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-762
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-404
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3255 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-486
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-495
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate |
2007-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ab5633f45acecb0dc4bfa36f8815699
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_999adcf6457b339075c51d7890668d32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c903762b19c55fbbfc222250bfee901
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51854c0622c28525d809ff3ac9474307
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_986ab974bb0f408800f01e65dc50d54f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_480b388ca1d483a06d0fee80f783e307
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b4c6ec445685b2eaf399f7d3a857453 |
| publicationDate |
2009-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20090013645-A |
| titleOfInvention |
Plasma-resistant ceramic with controlled electrical resistance |
| abstract |
Certain ceramic materials are provided that are resistant to corrosion / erosion under semiconductor processing conditions utilizing corrosive / erosive plasma. The corrosive plasma may be a halogen-containing plasma. Certain ceramic materials are improved to provide a controlled electrical resistance that suppresses the possibility of plasma arc generation. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200143533-A |
| priorityDate |
2007-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |