| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2baf849d216e689ecc40ccc931a7a7bc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0254
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0426
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0256 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01G3-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01G3-13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-036 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N5-00 |
| filingDate |
2007-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c2a5389178072713a41951ea90bd492 |
| publicationDate |
2009-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20090009827-A |
| titleOfInvention |
Method for Measuring Sublimation in Thermosetting Film Using a PCM Sensor |
| abstract |
The present invention relates to a method for measuring a sublimation in a thermosetting film using a QCM sensor, wherein the thermosetting film is formed on the silicon wafer 16 and surrounds the thermosetting film during heating by a heat source under the silicon wafer 16. The airflow is directly attached to the crystal oscillator 4 by the nozzle 5 formed in the detection part 3 provided in the process of the airflow, and the sublimation from the thermosetting film which flows with the airflow toward the upper part of (2). In addition, the present invention provides a method of measuring the amount of a sublimate in real time with the passage of a heating time. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190083008-A |
| priorityDate |
2006-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |