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publicationDate 2009-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20090008966-A
titleOfInvention Image sensor and its manufacturing method
abstract An image sensor according to an embodiment includes a semiconductor substrate including a CMOS circuit; An interlayer insulating film including metal wires disposed on the semiconductor substrate; A lower electrode disposed on the metal wiring; An intrinsic layer disposed on the interlayer insulating layer including the lower electrode; A salicide layer disposed on the intrinsic layer; And a conductive conductive layer disposed on the salicide layer.
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