| abstract |
The present invention utilizes a micro heater unit or an array that can significantly reduce the power consumption and grow a large area. The present invention relates to a nanostructure or polycrystalline silicon formed thereby, and an electronic device using the same. According to the present invention, it is possible to form nanostructures or polycrystalline silicon, such as carbon nanotubes, gallium nitride nanowires, zinc oxide nanowires, and the like, in particular, with low power consumption and large area, without a separate high temperature processing apparatus. |