| abstract |
An object of the present invention is to propose a method for producing a liquid crystal display device having a thin film transistor having high reliability of electrical characteristics with high productivity.n n n In a liquid crystal display device having a reverse staggered thin film transistor, in a reverse staggered thin film transistor, a gate insulating film is formed over a gate electrode, a microcrystalline semiconductor film serving as a channel formation region is formed over the gate insulating film, and a buffer layer is formed over the microcrystalline semiconductor film. And a pair of source and drain regions are formed over the buffer layer, and a pair of source and drain electrodes are formed in contact with the source and drain regions to expose a portion of the source and drain regions.n n n n Semiconductor, Display, Transistor, Pixel, Source, Drain, Liquid Crystal |