http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20090002583-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3e08533e16c8bb3dfa9c6a6b1521ec43 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-36 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2007-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_759dbe69c27ba9a47917931b5743a411 |
| publicationDate | 2009-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20090002583-A |
| titleOfInvention | Gray-tone mask, manufacturing method of gray-tone mask, phase mask manufacturing method using gray-tone mask and phase mask manufactured by gray-tone mask |
| abstract | The present invention relates to a gray-tone mask, a method of manufacturing a gray-tone mask, a method of manufacturing a phase mask using a gray-tone mask, and a phase mask manufactured by a gray-tone mask, and a transparent substrate and one surface of the transparent substrate. A gray-tone having a plurality of transmission layers deposited to have different light transmittances to form an exposure pattern, and a blocking layer forming a pattern different from the transmission layer to block light upon exposure to form a light shielding pattern By using a mask, it is possible to produce a phase mask having a transparent mask substrate and a plurality of phase level layers formed by photoresists having different thicknesses so as to have different phase modulation levels on one surface of the transparent mask substrate. have. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10795168-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11579456-B2 |
| priorityDate | 2007-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.