http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20080099818-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_48e7fcb815e3579b86109198cbc70ea4 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P10-20 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67167 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2008-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6d1b0b89768ba61fdad010a8f929006 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42e6e8e307dd75c2aceeb2361631e16f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_476721d8dd05045d1edbca1ac3c6cd9b |
| publicationDate | 2008-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20080099818-A |
| titleOfInvention | Treatment liquid regeneration method and recovery method of the metal contained in the treatment liquid |
| abstract | Provided are a treatment liquid regeneration method and the like capable of regenerating the treatment liquid at low cost and efficiently by removing metal components contained in the treatment liquid for substrate treatment.n n n In the treatment area to be subjected to the substrate treatment, the treatment liquid is passed through a carrying container 1 filled with an adsorbent that adsorbs metal ions therein, and the metal component in the treatment liquid is adsorbed to the adsorbent to separate and remove the treatment liquid. 1st conveyance process which conveys the carrying container 1 which let process and the process liquid passed through to the adsorption material regeneration area which regenerates an adsorption material as an area | region separated from a processing area, and the carry which conveyed from a processing area in an adsorption material regeneration area. An adsorbent regeneration step of passing the eluent through the container 1, eluting the metal adsorbed to the adsorbent, and regenerating the adsorbent; and a second conveyance of returning the carrying container 1 regenerating the adsorbent from the adsorbent regeneration area to the treatment area. In the process liquid regeneration process, the carrying container 1 after adsorption material regeneration is used. |
| priorityDate | 2007-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.