| abstract |
The present invention relates to a capacitor for improving the conductivity of a capacitor electrode and a method for manufacturing the same. To this end, the present invention provides a first electrode doped with an electron donor, a dielectric film on the first conductive layer and a second film on the dielectric film. A capacitor including an electrode is provided, and the present invention described above can further enhance leakage current suppression force and electric field strength, so that when used in an ultra-high density product family of 1G class or more in which a metal wiring process of 60 nm or less is adopted, high quality electrical characteristics In addition, the reliability of the product can be obtained simultaneously. |