http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20080086816-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2891 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-26 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2008-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_154c415f87459e249532e2ada9579e18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf1c9d80011d423722b2c45fbf7aec0e |
| publicationDate | 2008-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20080086816-A |
| titleOfInvention | Needle tip position detection method, alignment method, needle tip position detection device and probe device |
| abstract | The present invention provides a method for detecting the needle tip position of a probe which can detect the height of a plurality of probes with high accuracy and can significantly increase the reliability of the inspection. In the method for detecting the tip position of the probe of the present invention, the needle tip position detection device 16 of the plurality of probes is detected using the needle tip position detection device 16 provided on the wafer chuck 11 having a sensor unit 162 and a contact body 162B. In this case, the needle tip position detection device 16 is raised via the wafer chuck 11 to bring the soft member 162D on the contact body 162C into contact with the needle tips of the plurality of probes, and the wafer chuck 11 is further provided. The step of lowering the contact body 162B toward the sensor unit 162 side without raising the plurality of probes elastically by raising, and determining the position where the contact body 162B starts to descend as the needle tip height of the plurality of probes. It is equipped with the process to make. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150131495-A |
| priorityDate | 2007-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962 |
Total number of triples: 17.