http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20080086378-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-122 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C381-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2008-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ba3d4b81afe3bd34d3a8f0197bfe93b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_830b8c370f2092414da814524918af24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_47dfc59ffde831488f20bdcd86fb640a |
| publicationDate | 2008-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20080086378-A |
| titleOfInvention | Chemically Amplified Resist Composition |
| abstract | The present invention contains a structural unit having a salt of formula (A), a salt of formula (B), and an acid labile group and is insoluble or poorly soluble in aqueous alkali solution, but is soluble in aqueous alkaline solution by the action of acid. It relates to a chemically amplified resist composition comprising a resin (C).n n n Formula 1n n n n n n n n In Formula 1 above,n n n R 21 is a C1-C30 hydrocarbon group or the like,n n n Q 1 and Q 2 are each independently a fluorine atom or the like,n n n A + is at least one organic cation selected from the cation of Formula 1a, the cation of Formula 1b and the cation of Formula 1c.n n n Formula 1an n n n n n n n In Formula 1a above,n n n P 1 , P 2 and P 3 are each independently a C1-C30 alkyl group or the like.n n n Formula 1bn n n n n n n n In Formula 1b above,n n n P 4 and P 5 are each independently a hydrogen atom or the like.n n n Formula 1cn n n n n n n n In Formula 1c above,n n n P 10 , P 11 , P 12 , P 13 , P 14 , P 15 , P 16 , P 17 , P 18 , P 19 , P 20 and P 21 are each independently a hydrogen atom,n n n B is a sulfur atom or an oxygen atom,n n n m is 0 or 1;n n n Formula 2n n n n n n n n In Formula 2 above,n n n A ' + is at least one organic cation selected from a cation of Formula 1a, a cation of Formula 1b and a cation of Formula 1c,n n n E − is at least one organic anion selected from anions of formula 2-1 and anions of formula 2-2.n n n Formula 2-1n n n n n n n n Formula 2-2n n n n n n n n In the above formula 2-1 and 2-2,n n n Q 3 is a C1-C10 perfluoroalkyl group,n n n Q 4 is a C1-C10 perfluoroalkyl group. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20120115138-A |
| priorityDate | 2007-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 50.