http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20080068565-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2f8cfa5aee4410611b5c562275c9f8e3 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2008-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6197d7845f766fdbcb7b7029f0e635fd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d292d3d52d237cc01ec0311ab604647 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_192a526d13b31212287e15ddea07e002 |
| publicationDate | 2008-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20080068565-A |
| titleOfInvention | Resist composition |
| abstract | The present invention not only improves the solubility in producing a resist and resist film adhesion in developing, but also improves resist stability and provides a resist composition excellent in safety.n n n The present invention is a resist composition comprising a resist component and an organic solvent, wherein as the organic solvent, (a) a hydroxy polyvalent carboxylic acid ester comprising a hydroxy polyvalent carboxylic acid ester having 2 to 6 carbon atoms in the carboxylic acid moiety. An acetoxycarboxylic acid ester compound group consisting of a compound group, (b) an acetoxycarboxylic acid ester having 2 to 6 carbon atoms in the carboxylic acid moiety, and (c) an alkoxy having 2 to 6 carbon atoms in the carboxylic acid moiety. Provided is a resist composition comprising at least one organic solvent selected from the group of alkoxycarboxylic acid ester compounds consisting of carboxylic acid esters. |
| priorityDate | 2007-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 345.