| abstract |
The present invention provides a method for producing a diamond having a high-precision needle-like protrusion structure on its surface, which can be applied to materials of various shapes while simplifying the manufacturing process.n n n In the present invention, at least in the region near the surface of the diamond substrate, boron (B), nitrogen (N), aluminum (Ai), silicon (Si), phosphorus (P), sulfur (S), copper (Cu) and arsenic (As) ), Dry etching with oxygen gas on diamond substrate 2a doped with one or more of dopants of 1 mol, molybdenum (Mo), platinum (Pt), and gold (Au) at a concentration of 1 × 10 19 pieces / cm 3 or more. By treating the surface of the diamond substrate by means of the above, the needle-like protrusion structure 3 is formed on the surface of the diamond substrate.n n n n Diamond, needle, plasma, dopant, ion implantation, electrode, electronic device |