| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_81cfb88d909c75104c0c8d61799a72b0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-6659
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7833 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-6656
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-6653
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-08 |
| filingDate |
2006-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d9ab7bc7f9917ad598c1e5a0f00ce3e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3f7e98715e9bbf10ed8bddee62675605
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0348c10f46675dffacf676d198086be |
| publicationDate |
2008-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20080059429-A |
| titleOfInvention |
Compositions and Methods for Selectively Etching Gate Spacer Oxide Materials |
| abstract |
The present invention provides a removal composition and method for at least partially removing the gate spacer oxide material from a microelectronic device having a gate spacer oxide material on its surface. The anhydrous removal composition comprises at least one organic solvent, at least one chelating agent, a base fluoride and an acid fluoride component, and optionally at least one passivating agent. The composition selectively removes the gate spacer oxide material relative to polycrystalline silicon and silicon nitride from near the gate electrode on the surface of the microelectronic device with minimal etching of the metal silicide interconnect material species used in the gate electrode structure. |
| priorityDate |
2005-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |